Influence of ion beam assistance on plasma of twin magnetron MF reactive sputtering

WANG Yonglin, WU Jianhua, LIU Hongyan, YAN Yue

Science & Technology Review ›› 2021, Vol. 39 ›› Issue (9) : 61-65.

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Science & Technology Review ›› 2021, Vol. 39 ›› Issue (9) : 61-65. DOI: 10.3981/j.issn.1000-7857.2021.09.007
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Influence of ion beam assistance on plasma of twin magnetron MF reactive sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 39(9): 61-65 https://doi.org/10.3981/j.issn.1000-7857.2021.09.007

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